High Dynamic Range Calibration for an Infrared Shack-Hartmann Wavefront Sensor

摘要

Since its invention in the early seventies, the Shack-Hartmann wavefront sensor has seen a wide variety of applications and has had great success in the fields of Adaptive Optics and Ophthalmology, where interferometry is usually impractical. Its application to optical shop testing has been less visible perhaps because shop environments can be manipulated to sufficiently remove vibration and turbulence to a degree that can support interferometry. However, with the growing need to accurately test aspheric optics, the Shack-Hartmann has an advantage; its dynamic range can be manipulated through the design of the lenslet array, rather than being directly tied to the wavelength of light and therefore lessen the need for expensive null optics.When the Shack-Hartmann is pushed to the limits of dynamic range, several issues must be dealt with. First, to reach the limits of dynamic range, those limits must be well understood. This dissertation presents a graphical approach to designing the Shack-Hartmann sensor that makes the trade-off between sensitivity and dynamic range, and accuracy and resolution intuitively clear. Next, the spots that once landed neatly in the region behind each lenslet, may now wander several lenslets away and the data reduction must be able handle this. This dissertation presents a novel and robust method for sorting these widely wondering spots and is shown to work in measurements of highly aspheric elements. Finally, in the high dynamic range regime, induced aberrations can severely limit the accuracy of the instrument. In this dissertation, these non-linear and measurement-dependent errors are studied in detail and a method of compensation is presented along with experimental results that illustrate the efficacy of the approach.