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Optical And Structural Investigations Of Defects In CdZnTe(Zn ~ 4) Crystals

机译:CdZnTe(Zn〜4%)晶体缺陷的光学和结构研究

摘要

The CdTe family members (in particular CdZnTe) remain the substrate of choice for epitaxial growth of HgCdTe for use in high performance infrared (IR) detectors and focal plane arrays. This is the case despite advances in the use of alternate substrate technologies such as buffered GaAs and GaAs on Si; these technologies, to date, have not reproducibly demonstrated device performance comparable to the arrays made in HgCdTe grown on CdZnTe and CdTe. The quality of CdTe family materials has improved significantly over the past several years and so the quality and reproducibility of IR detectors has improved along with them. It is clear, however, that CdTe family substrates still have a significant impact on the performance of HgCdTe devices and that further research is required to reduce the effects of substrate on these devices. Unlike silicon or gallium arsenide, it is very difficult to grow the large area single crystals of CdZnTe due to thermodynamic limitations. It has the lowest thermal conductivity among all semiconductors that makes it difficult to obtain planar solid-liquid interface, which is desirable for the growth of large area single crystals of CdZnTe. Due to its high ionicity and weak bonding, defects are easily incorporated during the growth. Also, it is well established that both the structural defects and impurity content of Hg1-xCdxTe epitaxial layers are strongly influenced by the quality of the substrates used in the epitaxial growth process. A substrate of poor structural quality will result in a poor substrate/layer interface from which defects will propagate into the epilayer. It is known that our focal plane arrays (FPAs) are backside illuminated, with the device connected to underlying silicon multiplexer, using a matrix of indium bumps. Thus the substrate should have high IR transmission to pass the radiation on to the detector for collection. High IR transmission requires chemically and electrically homogeneous crystals free from extraneous second phase particles. This objective is one of the most difficult thermodynamic and technological problems in the growth of CdTe and related alloys. The bulk CdZnTe crystals grown from melt suffer from the inherent disadvantage of accommodating tellurium precipitates because of high growth temperature and phase diagram limitations. These tellurium (Te) precipitates condense as cadmium vacancies and Te interstitials during the cooling process, which contribute to intrinsic point defects. Although extensive efforts have been made in the area of purification of the CdZnTe crystals by using 6N pure starting materials, still the high temperature melt growth leads to impurity pickup during the crystal growth process. This deviation in the stoichiometry, especially due to free carriers, impurities and second phase tellurium precipitates, play the major role in reducing the infrared transmission through the CdZnTe substrate material. Also they affect the device performance when used for detector applications. In this context a thorough investigation of the non-stoichiometry of the CdZnTe material is mandatory to improve the material quality. It is my endeavor in this respect to present in this thesis “optical and structural investigations of defects in CdZnTe (Zn~4%) crystals”. The present thesis has been organized into six chapters. Chapter 1: It presents an up to date comprehensive review of the defects in CdTe binary and CdZnTe ternary compound semiconductors. It includes an introduction to the ternary II-VI cadmium zinc telluride with potential device applications. Issues related to CdTe based substrates for infrared (IR) applications have been discussed. Growth as well as several material aspects like crystal structure, band structure, mechanical, thermal, optical and dielectric properties have been discussed in details. The chapter ends with the motivation and scope for the present thesis. Chapter 2 : Te precipitates were identified and characterized in CdZnTe (Zn ~ 4%) crystals using various physical characterization techniques and the results are presented in Chapter 2. X-ray diffraction rocking curve measurements were carried out on a series of samples to assess the overall crystalline quality of the as grown CdZnTe crystals, in conjunction with Fourier transform infrared (FTIR) absorption spectroscopy measurements to identify the presence of Te precipitates. Further, the CdZnTe samples having Te precipitates were systematically characterized using micro-Raman imaging technique. CdZnTe wafers grown in three and six zone furnaces using quartz and/or pyrolytic boron nitride (PBN) crucibles have been subjected to micro-Raman imaging to quantify and understand the nature of Te precipitates. It is well known that for the normal phase of Te precipitates, the Raman modes appear centered around 121 (A1), 141(E) /TO (CdTe) cm -1and a weak mode around 92 (E) cm -1 in CdZnTe indicating the presence of trigonal lattice of Te. Using the micro-Raman maps and taking the spatial distribution of the area ratio of 121 to 141 cm-1 Raman modes, the size and distribution of Te precipitates were estimated. A substantial reduction in Te precipitate size and an improvement in the IR transmission in the 2.2 – 5 µm IR window was observed in the CdZnTe crystals subjected to post growth annealing under Cd+Zn vapors at 650 oC for 6 hrs. Also it is shown that the samples grown in pyrolytic boron nitride (PBN) crucibles have shown an overall improvement in the crystalline quality and reduction in the Te precipitate size as compared to the samples grown in quartz crucibles. The possible reasons for these observations have been discussed in chapter 2. The presence of Te precipitates under high pressure phase was detected by the blueshift of the Raman bands that appear at 121 (A1) cm-1for a normal Te phase, indicating that these micro-Raman maps are basically the distribution of Te precipitates in different phases. NIR microscopy imaging has been carried out to further substantiate the presence of Te precipitates under high pressure phase and that of larger Te precipitates. The significance of micro-Raman imaging lies in quantifying and demonstrating the high pressure phase of Te precipitates in CdZnTe crystals in a non-destructive way. Also it is shown that the presence of Te precipitates lead to loss of useful signal in the 2.2 – 6 µm wavelength regions and hence are “deleterious” for substrate applications of CdZnTe crystals required for the growth and fabrication of HgCdTe detectors. Chapter 3: The effects of annealing and hydrogenation on the low temperature photoluminescence (PL) spectra of CdZnTe (Zn ~ 4%) crystals are reported in this chapter. It is shown that annealing at 600 oC for 12 hrs under Cd vapors has resulted in the disappearance of both C-A and DAP recombination features (attributed to singly ionized cadmium vacancy acceptors) observed in the 1.5 – 1.6 eV band edge region in the low temperature PL spectra of CdZnTe, confirming the origination of these bands from Cd vacancy defects. The presence of copper impurity has been identified by the appearance of the 1.616 (AoX) eV energy peak attributed to exciton bound to the neutral copper acceptor and the 1.469 eV band attributed to copper acceptor in the donor acceptor pair (DAP) recombinations. It is shown that, only annealing under Cd+Zn vapors at 650 oC for 6 hrs has resulted in the passivation of the 1.469 eV band and the mechanism has been explained invoking the Hume-Rothery rule. Passivation of the 1.469 eV band is significant, since CdZnTe substrate copper contamination was found to degrade HgCdTe epitaxial layer and hence the performance of HgCdTe infrared (IR) detectors. Also it shown that vacuum annealing has resulted in the introduction of a new defect band around 0.85 eV in the low temperature PL spectra of CdZnTe possibly due to the loss of Cd and/or Zn. Further, the effects of hydrogenation in passivating the defect bands observed in the low temperature PL spectra of the control CdZnTe crystals are discussed. Using micro-Raman imaging technique, it is shown that hydrogenation has resulted in the reduction in size and restoration of normal phase for Te precipitates, which otherwise were present under high pressure phase in CdZnTe crystals. It is shown that the net effect of hydrogenation is to improve the quality of CdZnTe crystals at low temperature (50 oC) as compared to the high Cd+Zn annealing temperature (650 oC) whose effect is only to reduce the size of Te precipitates. To further substantiate this an analysis of the temperature dependent resonance micro-Raman spectra recorded with 633 and 488 nm lasers has been made and it is shown that appearance of the multiple orders (up to 4 orders) of the CdTe like LO phonon modes and emergence of the ZnTe like LO phonon mode are clear indications of the improved quality of the hydrogenated CdZnTe crystals. Chapter 4: Manifestation of Fe2+and Fe3+charge states of Fe in undoped CdZnTe (Zn ~ 4 %) crystals grown in quartz crucibles by asymmetrical Bridgemann method and their respective optical and magnetic behaviors have been discussed in this chapter. Fe2+being optically active shows absorption around 2295 cm-1in the low temperature (T = 3 K) FTIR spectra, while Fe3+being magnetically active exhibits coexistence of para and ferromagnetic phases, as identified by low temperature electron spin resonance and supported independently by low temperature SQUID and AC susceptibility measurements. In the paramagnetic phase (TC ~ 4.8 K) the inverse of ac susceptibility follows the Curie-Weiss law. In the ferromagnetic phase (TC ~ 4.8 K) the thermal evolution of magnetization follows the well known Bloch’s T3/2 law. This is further supported by the appearance of hysteresis in the SQUID measurements at 2K below TC. Small coercive field of 10 Oe as estimated in the hysteresis suggests that the magnetic anisotropy is very small in these systems. Chapter 5: In this chapter, details of the indigenously developed laser beam induced current (LBIC) instrumentation have been presented. These include instrumental arrangement of the micro-mechanical system for raster scanning of defects in semicoductors and fabrication details of continuous flow liquid helium cryostat for low temperature LBIC measurements. Preliminary LBIC data recorded using this system have been shown to demonstrate the operability of the system. Chapter 6: This chapter includes a brief write-up summarizing the results and draws the attention for the possible future work. Appendix A: Here C++ programs for LBIC measurements are presented.Appendix B: Here the CAD diagrams for the full cross sectional view of the liquid helium cryostat consisting of “assembly liquid helium cryostat” and “part liquid helium cryostat” are attached.
机译:CdTe族成员(特别是CdZnTe)仍然是HgCdTe外延生长的首选衬底,用于高性能红外(IR)检测器和焦平面阵列。尽管在使用替代衬底技术(例如缓冲GaAs和Si上的GaAs)方面取得了进步,情况仍然如此。迄今为止,这些技术尚未可再现地证明其器件性能可与在CdZnTe和CdTe上生长的HgCdTe制成的阵列相媲美。在过去的几年中,CdTe系列材料的质量已显着提高,因此红外探测器的质量和可重复性也随之提高。但是,很明显,CdTe系列衬底仍然对HgCdTe器件的性能产生重大影响,需要进一步研究以减少衬底对这些器件的影响。与硅或砷化镓不同,由于热力学限制,很难生长大面积的CdZnTe单晶。在所有半导体中,它的导热系数最低,这使得难以获得平面的固液界面,这对于CdZnTe大面积单晶的生长是理想的。由于其高离子性和弱键合,在生长过程中容易掺入缺陷。同样,已经确定Hg1-xCdxTe外延层的结构缺陷和杂质含量都受到外延生长过程中所用衬底质量的强烈影响。结构质量差的衬底将导致差的衬底/层界面,缺陷将从其传播到外延层中。众所周知,我们的焦平面阵列(FPA)是背面照明的,该设备使用铟凸点矩阵连接到下面的硅多路复用器。因此,基材应具有较高的红外透射率,以将辐射传递到检测器进行收集。高红外透射率要求化学和电学均一的晶体,且没有多余的第二相颗粒。这个目标是CdTe和相关合金生长中最困难的热力学和技术问题之一。由于高的生长温度和相图限制,从熔体生长的块状CdZnTe晶体具有容纳碲沉淀物的固有缺点。这些碲(Te)在冷却过程中以镉空位和Te间隙的形式析出冷凝物,这会导致本征点缺陷。尽管在通过使用6N纯起始原料纯化CdZnTe晶体方面进行了广泛的努力,但是高温熔体生长仍会在晶体生长过程中导致杂质的吸收。化学计量的这种偏差,尤其是由于自由载流子,杂质和第二相碲沉淀所致,在减少通过CdZnTe衬底材料的红外透射中起着主要作用。当用于检测器应用时,它们也会影响设备性能。在这种情况下,必须对CdZnTe材料的非化学计量进行彻底研究,以提高材料质量。在这方面,我的工作是提出“ CdZnTe(Zn〜4%)晶体缺陷的光学和结构研究”。本论文分为六章。第1章:介绍了CdTe二元和CdZnTe三元化合物半导体中的缺陷的最新综述。它包括对三元II-VI碲化镉锌及其潜在器件应用的介绍。已经讨论了与用于红外(IR)应用的基于CdTe的基板有关的问题。已经详细讨论了生长以及一些材料方面,如晶体结构,能带结构,机械,热,光学和介电性能。本章以本论文的动机和范围作为结尾。第2章:使用各种物理表征技术,鉴定了CdZnTe(Zn〜4%)晶体中的Te沉淀并进行了表征,结果在第2章中进行了介绍。对一系列样品进行了X射线衍射摇摆曲线测量,以评估其所生长的CdZnTe晶体的总体晶体质量,结合傅立叶变换红外(FTIR)吸收光谱测量来确定Te沉淀的存在。此外,使用微拉曼成像技术系统地表征了具有Te沉淀物的CdZnTe样品。使用石英和/或热解氮化硼(PBN)坩埚在三区和六区炉中生长的CdZnTe晶片已进行了显微拉曼成像,以量化和了解Te沉淀物的性质。众所周知,对于Te析出相的正相,拉曼模态以121(A1)为中心,141(E)/ TO(CdTe)cm -1和CdZnTe中92(E)cm -1附近的弱模表明存在Te的三角晶格。使用微拉曼图,并以121至141 cm-1拉曼模式的面积比的空间分布,估算了Te析出物的大小和分布。在650 oC的Cd + Zn蒸气下经过6小时的生长后退火的CdZnTe晶体中,Te沉淀物的尺寸大大减小,IR透射率在2.2-5 µm的IR窗口中得到改善。还表明,与在石英坩埚中生长的样品相比,在热解氮化硼(PBN)坩埚中生长的样品已显示出晶体质量的总体改善和Te沉淀尺寸的减小。这些观察的可能原因已在第2章中进行了讨论。高压相下Te沉淀的存在是通过正常Te相在121(A1)cm-1处出现的拉曼带的蓝移检测到的,表明这些微量元素-拉曼图基本上是Te相在不同相中的分布。已经进行了NIR显微镜成像,以进一步证实在高压相下Te沉淀的存在和较大Te沉淀的存在。显微拉曼成像的意义在于以无损方式定量和论证了CdZnTe晶体中Te沉淀的高压相。还表明,Te沉淀物的存在会导致在2.2–6 µm波长范围内丢失有用信号,因此对于HgCdTe检测器的生长和制造所需的CdZnTe晶体的基板应用“不利”。第三章:本章报道了退火和氢化对CdZnTe(Zn〜4%)晶体的低温光致发光(PL)光谱的影响。结果表明,在低温PL下,在Cd蒸气下于600 oC退火12小时,导致CA和DAP的复合特征消失(归因于单个离子化的镉空位受体)消失。 CdZnTe的光谱,证实了这些带的起源是Cd空位缺陷。铜杂质的存在已通过在施主受体对(DAP)重组中出现归因于与中性铜受体结合的激子的1.616(AoX)eV能峰和归因于铜受体的1.469 eV能带进行了鉴定。结果表明,只有在650 oC的Cd + Zn蒸气下退火6 hrs才能钝化1.469 eV谱带,并且已经解释了该机制引用了休ume-热定律。 1.469 eV波段的钝化非常重要,因为发现CdZnTe衬底铜污染会降低HgCdTe外延层的性能,从而降低HgCdTe红外(IR)检测器的性能。还表明,真空退火导致在CdZnTe的低温PL光谱中引入了约0.85 eV的新缺陷带,这可能是由于Cd和/或Zn的损失造成的。此外,还讨论了氢化对钝化在对照CdZnTe晶体的低温PL光谱中观察到的缺陷带的影响。使用显微拉曼成像技术显示,氢化导致Te沉淀物尺寸减小和正相恢复,否则在高压相下CdZnTe晶体中会存在Te沉淀物。结果表明,与高Cd + Zn退火温度(650 oC)相比,氢化的净作用是在低温(50 oC)下改善CdZnTe晶体的质量,后者的作用只是减小Te沉淀物的尺寸。为了进一步证实这一点,已经对用633和488 nm激光记录的温度相关共振微拉曼光谱进行了分析,结果表明CdTe的多个阶(最多4阶)像LO声子模一样出现并出现。 ZnTe像LO声子模式的特征清楚地表明了氢化CdZnTe晶体质量的提高。第四章:讨论了用非对称布里奇曼法在石英坩埚中生长的未掺杂CdZnTe(Zn〜4%)晶体中的Fe2 +和Fe3 +电荷态的表现,以及它们各自的光学和磁性。 Fe2 +具有光学活性,在低温(T = 3 K)FTIR光谱中显示约2295 cm-1的吸收,而Fe3 +具有磁性活性,则表现出对磁相和铁磁相共存由低温电子自旋共振确定,并由低温SQUID和AC磁化率测量独立支持。在顺磁相(TC〜4.8 K)中,磁化率的倒数遵循居里-魏斯定律。在铁磁相(TC〜4.8 K)中,磁化的热演化遵循众所周知的Bloch的T3 / 2定律。在低于TC 2K的SQUID测量中出现磁滞现象进一步证明了这一点。磁滞中估计的10 Oe小矫顽场表明,在这些系统中,磁各向异性非常小。第5章:在本章中,将介绍本地开发的激光束感应电流(LBIC)仪器的详细信息。这些包括用于对半导体中的缺陷进行光栅扫描的微机械系统的仪器布置,以及用于低温LBIC测量的连续流动液氦低温恒温器的制造细节。已经显示了使用该系统记录的初步LBIC数据来证明该系统的可操作性。第6章:本章包括一个简短的论文,总结了结果,并提请注意将来可能的工作。附录A:此处提供用于LBIC测量的C ++程序。附录B:此处,附有由“组装式液态氦低温恒温器”和“部分液态氦低温恒温器”组成的液态氦低温恒温器完整截面图的CAD图。

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  • 作者

    Kulkarni Gururaj Anand;

  • 作者单位
  • 年度 2010
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  • 原文格式 PDF
  • 正文语种 en_US
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