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Comparison of LASER and LED illumination for fiber optic fringe projection

机译:激光和LED照明在光纤条纹投影中的比较

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摘要

The inspection of functional elements is a crucial part of modern production cycles. However, with higher integration of production machinery and products, the accessibility for measurement systems is more and more limited. A solution for this problem can be found in endoscopy techniques, which are able to transport the image information for optical measurement methods. In this paper, an optical inspection system based on the fringe projection proifllometry technique is presented. The iflber-optic fringe projection system uses two high-resolution image iflbers to connect a compact sensor head to the pattern generation and camera unit. In order to keep inspection times low, the system is developed with particular focus on fast projection times. This can be achieved by using a digital micro-mirror device, which is capable of projecting grey-scale patterns at a rate of more than 10 images per second. However, due to the low numerical aperture of the optical iflbers, a limiting factor for the pattern rate is the illumination path of the pattern generator. Two different designs of the illumination path are presented, which are based on a LASER light source as well as a LED light source. Due to low beam divergence and high intensities LASERs are well suited for iflber coupling. Unfortunately, the coherent property of the light has negative effects in certain measurement applications, as interference patterns, the so called speckle, appear on rough surfaces. Although speckle reducing methods are employed in the LASER beam path, the emergence of interference cannot be prevented completely. As an alternative, an illumination path based on a LED light source is demonstrated. To compare the effects of the speckle, based on measurements on a planar calibration standard both designs are compared in terms of phase noise, which is directly related to the noise in the reconstructed 3-D point data. Additionally, optical power measurements of both methods are compared to give an estimation of coupling eiflciency. Finally, the capabilities of the system are shown based on measurements of a micro-contour standard. © 2016 SPIE.
机译:功能元素的检查是现代生产周期的关键部分。然而,随着生产机械和产品的更高集成度,测量系统的可访问性越来越受到限制。可以在内窥镜技术中找到解决该问题的方法,该技术能够为光学测量方法传输图像信息。本文提出了一种基于条纹投影轮廓法的光学检测系统。 iflber光学条纹投影系统使用两个高分辨率图像iflbers将紧凑的传感器头连接到图案生成和相机单元。为了保持较低的检查时间,开发该系统时特别关注快速的投影时间。这可以通过使用数字微镜设备来实现,该设备能够以每秒超过10张图像的速率投影灰度图案。然而,由于光学镜的数值孔径低,所以图案率的限制因素是图案发生器的照明路径。提出了两种不同的照明路径设计,它们基于激光光源和LED光源。由于光束发散小和强度高,激光非常适合于iflber耦合。不幸的是,光的相干特性在某些测量应用中具有负面影响,因为干涉图样(所谓的斑点)出现在粗糙表面上。尽管在激光束路径中采用了减少斑点的方法,但是不能完全防止干涉的出现。替代地,说明了基于LED光源的照明路径。为了比较斑点的影响,基于对平面校准标准的测量,比较了两种设计的相位噪声,相位噪声与重建的3D点数据中的噪声直接相关。另外,将两种方法的光功率测量值进行比较以给出耦合效率的估计。最后,基于微轮廓标准的测量结果显示了系统的功能。 ©2016 SPIE。

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