An inkjet- and 3D-printed capacitive sensor system with an all-digital and flexible sensor read-out hardware is reported. It enables spectrometer devices with significantly reduced device outlines and costs. The sensor is developed as multilayer inkjet-printed electrode structure on a 3D-printed copper housing. Very high required position resolutions of r e s p o s < 50 nm and a wide measurement range of r m = 1000 μ m at an offset of d 0 = 1000 μ m in the considered spectrometers motivate this work. The read-out hardware provides high sampling rates of up to r s ≈ 10 ns and enables the generation of trigger signals, i.e., the mirror control signal, without a time lag. The read-out circuitry is designed as a carrier frequency system, which enables flexible choices of bandwidth and measurement signal frequency. It thus allows for separation in frequency from coupling parasitics, i.e., other frequencies present in the device under test, and makes the read-out quasi-noise-immune.
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机译：报告了一种带有全数字和柔性传感器读出硬件的喷墨和3D印刷电容传感器系统。它可以实现具有显着减少的设备轮廓和成本的光谱仪装置。传感器在3D印刷的铜壳上被开发为多层喷墨印刷电极结构。在所考虑的光谱仪中，R E S P O S <50nm的非常高的位置分辨率和R m =1000μm的宽度测量范围的R m =1000μm的偏移激活这项工作。读出硬件提供高达RS≈10ns的高采样率，并且可以在没有时间延迟的情况下实现触发信号的产生，即镜像控制信号。读出电路被设计为载波频率系统，其能够灵活地选择带宽和测量信号频率。因此，它允许在耦合寄生剂中分离频率，即在被测装置中存在的其他频率，并使读出的准噪声免疫。
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