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Nanostructured multilayer coatings of aluminium and aluminium oxide with tungsten

机译:纳米结构的铝和氧化铝多层涂层与钨

摘要

The development of nanostructured coatings which exhibit enhanced mechanical properties is currently of interest due to the importance of high performance coatings in a large range of applications. Single layer coatings have predominantly been used for these demanding applications, however the promising mechanical properties observed in multilayer coatings has shifted the focus of current research. In particular, there has been reports of the use of alternating materials with opposing mechanical properties, as seen in the abalone shell, which have exhibited hardness and toughness values significantly greater than either of their constituent materials. The main objective of this thesis was to fabricate Al/W nanostructured multilayers and determine if they exhibit enhanced mechanical properties. The Al/W nanostructured multilayers were fabricated using two different deposition techniques: pulsed magnetron sputtering and cathodic arc deposition. These two techniques differ in the energy of the depositing species and this results in significant differences in film properties. The indentation hardness of the coatings was measured using a Hysitron Nanoindenter. The relationship between the mechanical properties and microstructure was obtained using a range of characterisation techniques. Auger electron spectroscopy (AES), energy dispersive spectroscopy (EDS) and electron energy loss spectroscopy (EELS) were used to determine the chemical composition and stoichiometry, while cross-sectional transmission electron microscopy (XTEM) and energy filtered transmission electron microscopy (EFTEM) were used to explore the microstructure. The findings of this thesis showed very different results for the two deposition techniques. Although sputtering successfully produced well defined multilayers, no evidence of enhanced hardness was found for periods between 5 and 200 nm. On the other hand, arc deposited samples with intended periods between 1 and 200 nm showed a hardness enhancement above that of pure W, however the samples of highest hardness did not contain Al layers for much of their thickness. Arc deposited samples with the finest nominal periods (1 and 2 nm) contained W-Al intermetallics and were soft. The hardening mechanism was not attributed to a multilayer structure, rather to the introduction of defects in the W layers which acted as pinning sites for dislocations. A modified Hall-Petch equation for hardness enhancement fitted the data for W films prepared by pulsed cathodic arc in which the grain diameter was replaced by the nominal multilayer period. The difficulty producing Al layers on W surfaces in the cathodic arc was overcom e by changing the film growth mechanism by introducing Ar or O2 at the W/Al interface. In the latter case, Al2O3/W multilayers were formed but again showed no hardness enhancements. Complete microanalysis and characterisation of the multilayer structures is vital in determining the mechanisms which govern the hardness enhancements. The evidence in this thesis suggests that the defect density, and not the presence of interfaces are responsible for the hardness enhancement effect.
机译:由于高性能涂料在许多应用中的重要性,目前正在开发具有增强的机械性能的纳米结构涂料。单层涂层主要用于这些要求苛刻的应用,但是多层涂层中观察到的有希望的机械性能已经改变了当前研究的重点。特别是,已经报道了使用具有相反机械性能的交替材料,如在鲍鱼壳中所看到的,其表现出的硬度和韧性值明显大于它们的任何一种构成材料。本论文的主要目的是制造Al / W纳米结构多层,并确定它们是否表现出增强的机械性能。使用两种不同的沉积技术制备了Al / W纳米结构多层:脉冲磁控溅射和阴极电弧沉积。这两种技术在沉积物质的能量上有所不同,这导致了薄膜性能的显着差异。使用Hysitron Nanoindenter测量涂层的压痕硬度。机械性能和微观结构之间的关系是使用一系列表征技术获得的。使用俄歇电子能谱(AES),能量色散能谱(EDS)和电子能量损失能谱(EELS)来确定化学成分和化学计量,而截面透射电子显微镜(XTEM)和能量过滤透射电子显微镜(EFTEM)被用来探索微观结构。本论文的发现表明两种沉积技术的结果截然不同。尽管溅射成功地产生了定义明确的多层,但是在5到200 nm之间没有发现硬度增加的证据。另一方面,预期周期在1到200 nm之间的电弧沉积样品显示出比纯W硬度更高的硬度,但是硬度最高的样品在其大部分厚度中都不含Al层。电弧沉积的标称周期最短的样品(1和2 nm)包含W-Al金属间化合物,并且很软。硬化机制不是归因于多层结构,而是归因于W层中的缺陷引入,这些缺陷充当位错的钉扎位点。修改后的用于增强硬度的Hall-Petch方程拟合了通过脉冲阴极电弧制备的W膜的数据,其中,用标称多层周期代替了晶粒直径。通过在W / Al界面引入Ar或O2来改变膜的生长机理,克服了阴极弧在W表面产生Al层的困难。在后一种情况下,形成了Al2O3 / W多层膜,但硬度没有增加。多层结构的完整显微分析和表征对于确定控制硬度增加的机制至关重要。本文的证据表明,缺陷密度而不是界面的存在是造成硬度提高的原因。

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    Burgmann F;

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  • 年度 2007
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