Contactless Optoelectronic Position Sensing

摘要

Increasing automation in production processes gives rise to an equivalent demand in optoelectronic sensor systems for automatic measurement and control. Both lateral and normal sensing systems are to be developed as photoelectric perflectometer and z - axis probe. Concentric circular grids are used for sensing in two dimensions with the perflectometer as well as for automatic adjustment of the instrument, and the resulting moire patterns are detected by a matrix solid state image sensor. The use of light emitting diodes gives a small and rugged z - axis probe. As with the autofocus the measuring principle employs the concept of disappearing parallaxe. The accuracy in the submicrometer range makes it possible to use the perflectometer for dimensional measuring as well as for exact positioning of work pieces having moderate surface roughness and dimensions. The z - axis probe has a capture range of plus or minus 0.1 mm and an accuracy of better than 1 micrometer even on rough surfaces.