Preliminary Control Technology Survey on Fairchild Semiconductor, 333 Western Avenue, South Portland, Maine

摘要

A preliminary control technology assessment survey was conducted at Fairchild Semiconductor (SIC-3674), South Portland, Maine, on December 4, 1981. The facility manufactured digital bipolar integrated circuits with a staff of 890 production workers and 270 administrators. The facility used a variety of control strategies to control emissions and limit worker exposures to chemical and physical agents. Strategies included engineering controls such as local exhaust ventilation, X-ray and radiofrequency radiation shielding, and process isolation or enclosures; personal protective equipment; and monitoring systems. Local exhaust ventilation of process equipment was used wherever potentially dangerous, toxic, corrosive, or flammable liquid chemicals were used. Shielding was used in ion implantation units to control X-ray emission in plasma etching and plasma enhanced; chemical vapor deposition operations to control radiofrequency emissions, and in substrate exposure to control ultraviolet emissions. Continuous area monitoring of selected chemical agents and radiation film badges were employed. The authors conclude that the facility had an extremely well managed health and safety program that included industrial hygiene, safety, and occupational health.