Preliminary investigation of an additive approach to the fabrication of precision aspheres

摘要

We report progress in the aspherization of precision optical substrates via deposition of graded period Mo/Si multilayer coatings using a masking technique. These preliminary results show good agreement between the measured and desired thickness profiles over 85% of the sample, however, thickness deviations of up to 7 % are observed in the central area. The errors are attributed to misalignments of the mask relative to the substrate during deposition.