A Study of the Characteristics of an Atmospheric Pressure Microwave-Induced Argon Plasma

摘要

A microwave induced argon plasma is produced at atmospheric pressure in a capacity loaded resonant cavity operated at 2450 MHz and 100 to 300 watts. Plasma parameters such as electron temperature and electron density are measured spectroscopically under various argon flow rates and power inputs to the cavity. The gas translational temperature of the plasma is estimated by measuring the rotational temperature of C2 molecules, this is done by mixing 5% of methane by volume with the argon gas. The general characteristics of the microwave induced argon plasma as a possible ion source for mass spectroscopy are studied.