Development of a precision, wide-dynamic-range actuator for use in active optical systems

摘要

The design, operation, and performance of a wide-dynamic-range optical-quality actuator are discussed. The actuator uses a closed-loop control system to maintain accurate positioning and has an rms noise performance of 20 nm. A unique force offloading mechanism allows the actuator coil to dissipate less than 3 mW under quiescent conditions. The operation of an experimental segmented optical system that uses 18 of the actuators is examined to show how they are integrated into an actual system.