Demonstration of a Monolithic Micro-Spectrometer System

摘要

The starting design of a spectrometer based on a modified Czerny-Turner configuration containing five precision surfaces encapsulated in a monolithic structure is described. Since the purpose at the early stages of the development was to demonstrate the feasibility of the technology and not an attempt to address a specific sensing problem, the first substrate material chosen was optical quality polymethyl methacrylate (PMMA). The final system design decision was narrowed down to two possible configurations containing five and six precision surfaces. The five surface design was chosen since it contained one less precision optical surface, yet included multiple off-axis spheres. In this particular design and material system, the mass was kept below 7 g. The wavelength range (bandpass) design goal was 1 micrometer (0.6 - 1.6 micrometers). The PMMA is particularly transparent in this wavelength region and there are interesting effects to monitor within this band. The optical system was designed and optimized using the ZEMAX optical design software program to be entirely alignment free (self aligning).