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Method and Apparatus for Producing a Substrate with Low Secondary Electron Emissions

机译:用于制造具有低二次电子发射的衬底的方法和设备

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摘要

The present invention is directed to a method and apparatus for producing a highly-textured surface on a copper substrate with only extremely small amounts of texture-inducing seeding of masking material. The texture-inducing seeding material is delivered to the copper substrate electrically switching the seeding material in and out of a circuit loop.

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