Two-dimensional Green's function Poisson solution appropriate for feature- scale microelectronics simulations

摘要

This report describes the numerical procedure used to implement the Green's function method for solving the Poisson equation in two-dimensional Cartesian coordinates. The procedure can determine the solution to a problem with any or all of applied voltage boundary conditions, dielectric media, floating (insulated) conducting media, dielectric surface charging, periodic (reflective) boundary conditions, and volumetric space charge. The numerical solution is reasonably fast, and the dimension of the linear problem to be solved is that of the number of elements needed to represent the surfaces, not the whole computational volume. The method of solution is useful in the simulation of plasma particle motion in the vicinity of complex surface structures as found in microelectronics plasma processing applications. A FORTRAN implementation of this procedure is available from the author.