Wideband optical monitor for a planetary-rotation coating-system

摘要

A substrate-specific, through-planet, wideband optical coating monitor is being developed to increase production yield and the understanding of physical vapor deposition (PVD) coatings fabricated in the Optical Manufacturing Laboratory at the University of Rochester's Laboratory for Laser Energetics. In- situ wideband optical monitoring of planetary rotation systems allows direct monitoring of large, expensive substrates with complex layering schemes. The optical monitor discussed here is under development for coating several large (e.g., 80.7 x 41.7 x 9.0 cm) polarizers for the National Ignition Facility. Wideband optical monitoring of the production substrates is used in concert with an array of crystal monitors for process control, film parameter evaluation, and error detection with associated design reoptimization. The geometry of a planetary rotation system, which produces good uniformity across large substrates, makes optical monitoring more difficult. Triggering and timing techniques for data acquisition become key to the process because the optical coating is available only intermittently for monitoring. Failure to properly consider the effects of the system dynamics during data retrieval and processing may result in significant decreases in the spectral data's reliability. Improved data accuracy allows better determination of film thicknesses, indices, and inhomogeneities and enables in-situ error detection for design reoptimization.