Reflectivity profilometer for the optical characterisation of grade reflectivity mirrors in the 250 nm - 1100 nm spectral region

摘要

It's developed the prototype of an instrument that can be used for the optical characterisation of graded reflectivity mirrors at any wavelength in the spectral region from 250 nm to 1100 nm. The instrument utilises a high- pressure Xe arc lamp as light source. Light is spectrally filtered by means of a grating monochromator. The sample is illuminated with an image of the monochromator exit slit. After reflection from the sample, this image is projected onto a 1024-elements charge-coupled device linear array driven by a digital frame board and interfaced with a personal computer. It's tested the instrument accuracy by comparing measurement results with the corresponding ones obtained by means of a laser scanning technique. Measurement Rms repeatability has been estimated to be approximately of 0.8%.