Precision formed micro magnets: LDRD project summary report

摘要

A microfabrication process is described that provides for the batch realization of miniature rare earth based permanent magnets. Prismatic geometry with features as small as 5 microns, thicknesses up through several hundred microns and with submicron tolerances may be accommodated. The processing is based on a molding technique using deep x-ray lithography as a means to generate high aspect-ratio precision molds from PMMA (poly methyl methacrylate) used as an x-ray photoresist. Subsequent molding of rare-earth permanent magnet (REPM) powder combined with a thermosetting plastic binder may take place directly in the PMMA mold. Further approaches generate an alumina form replicated from the PMMA mold that becomes an intermediate mold for pressing higher density REPM material and allows for higher process temperatures. Maximum energy products of 3--8 MGOe (Mega Gauss Oersted, 1 MGOe = 100/4{pi} kJ/m{sup 3}) are obtained for bonded isotropic forms of REPM with dimensions on the scale of 100 microns and up to 23 MGOe for more dense anisotropic REPM material using higher temperature processing. The utility of miniature precision REPMs is revealed by the demonstration of a miniature multipole brushless DC motor that possesses a pole-anisotropic rotor with dimensions that would otherwise prohibit multipole magnetization using a multipole magnetizing fixture at this scale. Subsequent multipole assembly also leads to miniaturized Halbach arrays, efficient magnetic microactuators, and mechanical spring-like elements which can offset miniaturized mechanical scaling behavior.