Gas Phase Chemical Detection with an Integrated Chemical Analysis System

摘要

Microfabrication technology has been applied to the development of a miniature,multi-channel gas phase chemical laboratory that provides fast response, small size, and enhanced versatility and chemical discrimination. Each analysis channel includes a sample preconcentrator followed by a gas chromatographic separator and a chemically selective surface acoustic wave detector array to achieve high sensitivity and selectivity. The pefrormance of the components, individually and collectively, is described.