Bendable X-Ray Optics at the ALS: Design, Tuning, Performance and Applications

摘要

We review the development at the Advanced Light Source (ALS) of bendable x-ray optics widely used for focusing of beams of soft and hard x-rays. Typically, the focusing is divided in the tangential and sagittal directions into two elliptically cylindrical reflecting elements, the so-called Kirkpatrick-Baez (KB) pair. Because fabrication of elliptical surfaces is complicated, the cost of directly fabricated tangential elliptical cylinders is often prohibitive. This is in contrast to flat optics, that are simpler to manufacture and easier to measure by conventional interferometry. The figure of a flat substrate can be changed by placing torques (couples) at each end. Equal couples form a tangential cylinder, and unequal couples can approximate a tangential ellipse or parabola. We review the nature of the bending, requirements and approaches to the mechanical design, and describe a technique developed at the ALS Optical Metrology Laboratory (OML) for optimal tuning of bendable mirrors before installation in the beamline. The tuning technique adapts a method previously used to adjust bendable mirrors on synchrotron radiation beamlines. However, in our case, optimal tuning of a bendable mirror is based on surface slope trace data obtained with a slope measuring instrument--in our case, the long trace profiler (LTP).