X-ray microimaging of elemental composition and microstructure for materials science. Workshop on application of synchrotron radiation to chemical engineering science, held in Argonne, IL (USA) on 22-23 Apr 1991

摘要

X rays have many advantages over electrons and other charged particles for the microcharacterization of materials. X rays are more efficient in photoejecting inner shell electrons which results in characteristic x-ray fluorescence. X rays also produce less Bremsstrahlung which yields far higher signal-to-background than obtained with electrons. Minimum detectable limits (MDL) for X ray excited fluorescence can be a few parts per billion; 10(sup (minus)3) to 10(sup (minus)5) less than for electron excitation. The third generation synchrotron radiation sources such as the Advanced Photon Source will for the first time provide x-ray sources as brilliant as the most advanced electron probes. It will therefore soon be possible to develop a submicron x-ray probe with unprecedented low levels of detection in diffraction, EXAFS, Auger, Photoelectron and fluorescence spectroscopies for structural and chemical characterization. Some applications to materials science are shown. (ERA citation 16:020692)