Nonlinear Optical Polymer Thin Film for the Inspection of Sub-MicrometerElectronic Circuits

摘要

Nonlinear optical properties of thin-film polymers are used, together with highspatial resolution of near-field optical microscopy, to create a novel diagnostic instrument for testing VLSI and ULSI integrated circuits (ICs). The instrument performs noninvasive measurements of the electric field generated by sub-micrometer size devices on ICs. Sub-micrometer spatial resolution, and sub-picosecond temporal resolution are both feasible. The instrument is capable of sensing extremely large bandwidth signals from a device within an IC, as well as generating a spatially distributed map of the electric field radiated by the circuit. The instrument is expected to fill a critical need in the areas of circuit design, reliability studies of integrated circuits, multi-chip modules and flat panel displays, and in production quality control.