Development and Calibration of Wall-Shear-Stress Microsensor Systems

摘要

The long term objective of this program has been to develop the requisite technologies for integrating different sensors and actuators in desired combinations with electronics and telemetry on the same substrate. This has been a multi-year program. We are now completing the program. Our concentration has been on wall-shear-stress sensors. We have produced and calibrated floating element wall-shear-stress sensors, both active and passive. We have developed a calibration channel and a calibration procedure based on continuum isothermal compressible channel flow. We have also developed and tested a wall-shear-stress sensors with integrated electronics initially based on the Analog Devices Inc. (AD1) airbag accelerometer circuitry, and more recently on one developed at CWRU. This most recent work continued the emphasis on the accuracy of the calibration process toward reducing the uncertainty of measurement from the past estimate of 5% to a goal of 1%. Our results are reported in a M.S. Thesis recently completed, followed by some additional Navier-Stokes computations. A journal manuscript is in preparation.