Organization of the Optical Society of America Photonic Science Topical MeetingSeries. Volume 3. The Microphysics of Surfaces: Beam-Induced Processes Held in Santa Fe, New Mexico on 11-13 February 1991

摘要

Contents: Beam Assisted Film Growth; Photon and Hot Electron Induced SurfaceReactions; Initiation and Growth of Surface Layers; Beam Assisted Etching; Laser Induced Desorption and Reaction; Processing and Applications; Structure and Deposition of Metal Overlayers; Surface Modification and Analysis; and Nanoscale Structure and Lithography.