Progress in growth, fabrication, and characterization of semiconductor photonic crystal nanocavities

摘要

We present the results of recent investigations into the fabrication and characterization of high-Q, small mode volume one-dimensional photonic crystal nanobeam cavities in Si and two-dimensional photonic crystal slab nanocavities in GaAs. The nanobeam cavity modes are investigated in transmission by means of a microfiber taper loop apparatus. The spectral transmission profile of the cavity modes is investigated as a function of input polarization into the fiber. The Q of the cavity for different positions and orientations of the fiber taper is investigated. The results are compared to measurements by resonant scattering. The slab nanocavities are investigated by means of quantum dot photoluminescence excitation spectroscopy. We present recent progress in growth and fabrication of such slab nanocavities.