Analysis of the reservoir length and its effect on electromigration lifetime

H.A. Le; Larry Ting; N.C. Tso

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Analysis of the reservoir length and its effect on electromigration lifetime

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This report studies the electromigration performance of W-plug via structures under the reservoir effect. The lifetime improvement factor M was observed to be a weak function of the stressing current and approximately equal to 2. A Simple model is included in the report to explain this observation. The model also predicts the most effective reservoir length for electromigration lifetime improvement.

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《Journal of Materials Research 》 |2002年第1期| 167-171| 共5页
作者
H.A. Le; Larry Ting; N.C. Tso;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种英语
中图分类工程材料学 ;
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Analysis of the reservoir length and its effect on electromigration lifetime

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