Development of high-reflectivity polymer/air-Bragg micromirror structures for nanophotonic applications

摘要

We report the design, nanofabrication, and characterization of high-quality polymer-based micromirror structures employing the 3D two-photon polymerization lithography technique. Compared to conventional microcavity approaches, our innovative concept provides microstructures, which allow fast prototyping. Moreover, our polymer-based mirrors are cost effective and environmentally sensitive, as well as compatible with a wide range of wavelengths from near-infrared to the telecom C-band. We demonstrate polymer/air distributed Bragg reflectors and full microcavity structures with up to 14 mirror pairs with a target wavelength of 1550 nm and a reflectivity close to 99. Additionally, our 3D printed micromirrors are reproducible and mechanically stable, and enable hybrid nanophotonic devices based on quantum dots, molecules, or 2D quantum materials as the active medium.