Polarization-stable single-mode multi-junction VCSELs with integrated anti-phase mode filter

摘要

In this paper, polarization-stable and spectrally single-mode operation of oxide-confined multi-junction vertical-cavity surface-emitting lasers (VCSELs) are achieved by using a non-circular integrated anti-phase transverse mode filter. A record-high single-mode output power is obtained by radially reducing effective mirror reflectivity at the surface areas where the higher order modes are expected to lase, leading to an increase in the threshold gain for these transverse modes, all the while minimal losses are introduced to the fundamental mode. The polarization control of such devices is achieved by using a non-circular mode filter in order to perturb the cylindrical symmetry of the cavity. An elliptically etched surface relief is shown to be effective in realizing a single-mode single-polarization device over a wide range of operating bias currents and temperatures. The continuous-wave light–current–voltage characteristics of 8-junction 940 nm VCSELs show single-mode output power >13 mW at room temperature, spectrally measured with a side-mode suppression ratio of >30 dB. This single-mode performance can be achieved depending on the ratio between the relief opening and the oxide aperture size. Additionally, the single-polarization behavior of such devices (with an extinction ratio of >15 dB) is shown to be dependent on the orientation of the elliptical mode filter, where the light is mainly polarized along the minor axis of the elliptical feature. Overall, combined with a multi-junction active region, the elliptical model filter is able to achieve highly efficient single-mode linearly polarized VCSELs.