Collodion-reinforcement and plasma-cleaning of target foils

摘要

The preparation of evaporated target foils can often be facilitated by use of collodion coatings either on the substrate sides or on the exterior surfaces of the foils. Later, such coatings must usually be removed. Cleaning of a foil is necessary if thin layers of adhesives have crept onto the foil. Removal and/or cleaning can often be done satisfactorily with an oxygen plasma. Apparatus and procedures used for this are described. Foils that were cleaned successfully, and some that were incompatible with the cleaning process are listed. (C) 2001 Elsevier Science B.V. All rights References: 46