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Automatic 3D surface reconstruction and sphericity measurement of micro spherical balls of miniaturized coordinate measuring probes

机译:微型坐标测量探针的微球形球的自动3D表面重建和球度测量

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摘要

This paper proposes an automatic three-dimensional (3D) surfacecontouring approach for accurate sphericity evaluation of micro tip balls of coordinate measuring probes using optical measurement and surface reconstruction. In the proposed approach, 3D volumetric data of the tip were constructed from cross-section contours using a 3D mapping algorithm. In addition, a volumetric intersection algorithm was derived from the optical perspective projection principle to remove artefact surface profiles from the volumetric data. A sphericity evaluation method involving minimum zone optimization was also developed to determine the sphericity of the inspected micro tip ball. The developed method is capable of measuring micro spherical balls having a diameter ranging from a few tenths of a micrometre up to several millimetres. An industrial case study was employed to verify the feasibility of the approach. The measurement results demonstrated that the proposed approach could achieve 3D surface reconstruction and evaluate sphericity of micro balls with maximum measurement errors of +-0.5 (mu)m.
机译:本文提出了一种自动三维(3D)表面轮廓方法,用于使用光学测量和表面重建来精确测量坐标测量探针的微尖球的球形度。在提出的方法中,使用3D映射算法从横截面轮廓构造尖端的3D体积数据。另外,从光学透视投影原理导出了体积相交算法,以从体积数据中去除伪影表面轮廓。还开发了一种涉及最小区域优化的球形度评估方法,以确定所检查的微尖球的球形度。所开发的方法能够测量直径范围从十分之几微米到几毫米的微球形球。工业案例研究被用来验证该方法的可行性。测量结果表明,所提出的方法可以实现3D表面重建并评估微球的球形度,最大测量误差为-0.5μm。

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