A metalorganic precursor containing Ti and Pt was synthesized using Ti alkoxide derivative, amino acid, and platinum salt. The decomposition behavior of the precursor and thin-film formation were examined in terms of microstructure evolution and crystallization. The precursor yielded anatase at 400deg C. Grain growth of platinum particles and TiO_2 grains was suppressed even at 800deg C in the films. Suppression of grain growth was attributed to an effect of film thickness.
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