On the theory of acoustic surfacehyphen;wave to bulkhyphen;wave scattering by grooves

摘要

This paper is concerned with analysis of the coherent scattering of surface acoustic waves into bulk waves by grooves. This scattering is important in devices such as reflective array devices because it leads to signal loss, and in devices such as grating scanners which make use of the scattered bulk waves. We show how published analysis of the scattering from a single groove, after suitable corrections, can be used to derive the scattering from infinite arrays of grooves, in agreement with other published results for this latter case. End effects in finite arrays are considered, together with comments on validity of calculations for grooves with steep walls.