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Effects of high‐intensity electron bombardment on the secondary‐emission characteristics of a MgO/Au‐cermet film

机译:高连字符;强电子轰击对MgO/Au连字符;金属陶瓷薄膜二次连字符连字符发射特性的影响

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An experiment to determine the durability of a 75 MgO/25 Au‐cermet film secondary‐emission cathode has been carried out over a period of 4000 h. A 2‐keV electron beam of 2 A/cm2current density was applied to a single spot and the secondary‐electron‐yield curve was monitored at regular intervals. To determine changes in chemical composition, Auger analysis was carried out with the same electron beam. Results of these tests indicated a decrease in maximum yield from 8.4 to 3.7 and a corresponding increase in the first crossover energy of 16 to 25 eV. Inspection of the relative intensities of the Auger spectral lines revealed that both Au and Mg increased relative to 0, with the Au line showing a steady increase during the first 500 h and then leveling off after 1500 h for the remainder of the testing period. The discovery of an apparent Au deficiency in the outer layers of the film is in accord with the initially high yield and the expected differential sputtering effects during argon sputter etching prior to the experiment. A surface profilometer measurement indicated that a crater of approximately 500 A˚ in depth was etched during the bombardment.
机译:在4000 h的时间内进行了确定75 MgO/25 Au‐金属陶瓷薄膜二次&连字符;发射阴极的耐久性的实验。将电流密度为2 A/cm2的2&连字符;keV电子束施加到单个点上,并定期监测二次&连字符;电子&连字符;产率曲线。为了确定化学成分的变化,使用相同的电子束进行俄歇分析。这些测试的结果表明,最大产率从8.4降低到3.7,第一次交叉能量相应增加16至25 eV。对俄歇谱线相对强度的检查显示,Au 和 Mg 相对于 0 均有所增加,Au 谱线在前 500 小时内稳步增加,然后在 1500 小时后在测试期的剩余时间内趋于平稳。在薄膜外层发现明显的金缺乏与实验前氩溅射蚀刻过程中的初始高产率和预期的差分溅射效应一致。表面轮廓仪测量表明,在轰炸期间蚀刻了一个深度约为500 A˚的陨石坑。

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