Uniaxial Co{sub}80Pt{sub}20 epitaxial films with in-plane anisotropy were prepared by dc sputter deposition using W/Ag templates on H-terminated Si(110) substrates. The epitaxial relationship as a function of the CoPt thickness, studied by electron and X-ray diffraction, is complex for CoPt thickness 5 nm, the epitaxial relationship was found to be CoPt(1010)0001‖W(112)110‖ Ag(110)001‖Si(110)001. Anisotropy constants were measured using in-plane torque curves and the initial magnetization curves along the hard axis. For 10 to 20 nm thick Co{sub}80Pt{sub}20, K{sub}1 was found to be ~9 × 10{sup}6 erg/cc and K{sub}2 was negligible.
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