Soft magnetic properties of multilayer FeY/SiN films

摘要

Magnetic properties of sputtered multilayer Fe100−xYx/Si3N4films (x=0–3.5 at. ) were studied. We developed heat resistant and corrosion resistant soft magnetic films having high saturation induction (Bs). The Fe97.7Y2.3/Si3N4film has aBsvalue of 17.3 kG, a coercive force (Hc) of 0.9 Oe, permeability at 5 MHz (mgr;) of 2800 and magnetostriction (lgr;s) of ∼−1×10−6after being annealed at 600 °C.