Magnetic properties of Fehyphen;N/Alhyphen;N multilayered films prepared by ionhyphen;assist sputtering

摘要

Fehyphen;N/Alhyphen;N multilayered films have been prepared by dualhyphen;ionhyphen;beam sputtering. The influences of nitrogen incorporation into Fe/Al multilayered films and the effects of postannealing on the soft magnetic properties have been investigated. For the multilayered films composed of Fehyphen;N and Alhyphen;N layers with thickness of 100 and 20 Aring;, respectively, coercivity of about 1 Oe and relative permeability of 2500 was attained by incorporating the proper content of nitrogen into each layer during deposition and then postannealing the films at 150thinsp;deg;C. Fehyphen;N/Alhyphen;N multilayered films prepared by the ionhyphen;assist sputtering technique used in this study may be useful as excellent soft magnetic materials.