Electron scattering cross sections and negative ion states of silane and halide derivatives of silane

摘要

The interaction of lowhyphen;energy electrons with silane and its halogenated derivatives is a fundamental step in many plasma chemical processes. The total scattering crosshyphen;section for electrons in the 0.2ndash;12 eV range are observed to range up to 10minus;14cm2. Scattering resonances are assigned to temporary negative ion states on the basis of correlations with analogous inner shell excitation resonances.