High index dielectric nanoparticles and metasurfaces have been proposed formany different applications, including light harvesting, sensing, and metalenses.However, widespread utilization in practice also requires large-scalefabrication methods able to produce homogeneous structures with engineeredoptical properties in a cost effective manner. Here, a facile fabricationmethod for silicon nanoparticles is presented that is scalable to 4 inchwafers and can produce a wide range of nanoparticle shapes on demand.Furthermore, it is shown that the fabricated nanoparticles can be detachedfrom their support using a simple substrate removal technique and thentransferred to colloidal suspension. The method is universal in the sense thatit can be used to generate monodispersed colloidal solutions of nanoparticlesof various shapes, sizes and compositions and it therefore opens up arange of new possibilities for applications, for example in nanomedicine andbionanotechnology.
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