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机译:
Sao Paulo State Univ, Dept Elect Engn, BR-15385000 Ilha Solteira, Brazil;
Fed Inst Mato Grosso Sul, BR-79641162 Tres Lagoas, Brazil;
Univ Sao Paulo, Escola Politen, Dept Mech Engn, BR-05508900 Sao Paulo, BrazilUniv Limerick, Dept Elect & Comp Engn, Opt Commun Res Grp, Limmerick V94 T9PX, Ireland;
Optical interferometry; Optical sensors; Laser beams; Adaptive optics; Piezoelectric materials; Semiconductor device measurement; piezoelectric transducers; signal processing; metrology;