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Studies on nonvolatile resistance memory switching In ZnO thin films

机译:ZnO薄膜中的非易失性电阻存储开关的研究

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Six decades of research on ZnO has recently sprouted a new branch in the domain of resistive random access memories. Highly resistive and c-axis oriented ZnO thin films were grown by us using d.c. discharge assisted pulsed laser deposition on Pt/Ti/SiO_2/Si substrates at room temperature. The resistive switching characteristics of these films were studied in the top-bottom configuration using current-voltage measurements at room temperature. Reliable and repeated switching of the resistance of ZnO thin films was obtained between two well defined states of high and low resistance with a narrow dispersion and small switching voltages. Resistance ratios of the high resistance state to low resistance state were found to be in the range of 2-5 orders of magnitude up to 20 test cycles. The conduction mechanism was found to be dominated by the Ohmic behaviour in low resistance states, while Poole-Frenkel emission was found to dominate in high resistance state. The achieved characteristics of the resistive switching in ZnO thin films seem to be promising for nonvolatile memory applications.
机译:ZnO的六十年研究最近在电阻性随机存取存储器领域萌芽了一个新的分支。我们使用直流电生长了高电阻和c轴取向的ZnO薄膜。放电辅助脉冲激光在室温下沉积在Pt / Ti / SiO_2 / Si衬底上。在室温下使用电流-电压测量在上下结构中研究了这些膜的电阻开关特性。 ZnO薄膜电阻的可靠且重复的切换是在高电阻和低电阻的两个明确定义的状态之间实现的,它们具有较窄的色散和较小的开关电压。发现高电阻状态与低电阻状态的电阻比在2至5个数量级的范围内,直至20个测试循环。发现在低电阻状态下,传导机制受欧姆行为支配,而在高电阻状态下,发现Poole-Frenkel辐射占主导。 ZnO薄膜中电阻开关的已实现特性对于非易失性存储器应用似乎很有希望。

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