AUTOMATED ONLINE IDENTIFICATION AND MONITORING OF IMPURITIES IN GASES

摘要

GC based gas analyzers with Reduction Gas Detector (RGD) and Flame Ionization Detector (FID) routinely measure single digit part-per-billion (ppb) level impurities in bulk gases, high purity process gases, air, lab, and field gas samples. Typical impurities detected include H2, CO, CH4, hydrocarbons, CO2, oxygenates, arsine, phosphine, and carbonyl sulfide. These analyzers have been used for continuous online gas analysis in air separation plants and semiconductor fabrication facilities for more than a decade. Systems are configured for dedicated applications.