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机译:改进液源化学气相沉积法制备Ru/BST/Ru电容器工艺
机译:ChemInform Abstract: Chemical Vapor Deposition of RuO2Thin Films Using the Liquid Precursor Ru(OD)3(OD: 2,4‐Octanedionate).
机译:Fabrication of Metal-insulator-metal Capacitors with SiNx Thin Films Deposited by Plasma-enhanced Chemical Vapor Deposition
机译:Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties
机译:a novel approach to Co/CNTs catalyst via chemical vapor deposition of organometallic compounds