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Some considerations on the electric field induced in insulators by electron bombardment

机译:Some considerations on the electric field induced in insulators by electron bombardment

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摘要

Starting from a simple model of the distributions of charge created in an insulator by bombardment with electrons, the components of the electric field are evaluated by using Maxwellrsquo;s equations and image effects. The results are applied to the most common experimental situations: a semihyphen;infinite sample (i) bounded by a vacuum or (ii) covered by a conducting film, and a sample in the form of a film (iii) unsupported or (iv) covering a conducting substrate. The results are compared to some experimental data concerning, for instance, electromigration and electronhyphen;stimulated desorption. In surface analysis the decay of the Auger signal from ions of opposite charges and the opposite behavior of ions of the same charge are explained. Similar effects observed in electronhyphen;probe microanalysis of glasses are also elucidated. The results concern scanning electron microscopy, transmission electron microscopy, and electronhyphen;beam lithography applied to biological objects, polymers, ceramics, minerals, glasses, and electronic devices. With slight modifications, the same model can be applied to cases of irradiation with ions or x rays. The evolution of the trapped charges with time is suggested, and the need to indicate the electric parameters (egr; and ggr;) of the investigated samples is outlined.

著录项

  • 来源
    《journal of applied physics 》 |1986年第5期| 1418-1430| 共页
  • 作者

    Jacques Cazaux;

  • 作者单位
  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 英语
  • 中图分类
  • 关键词

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