A chemical and mechanistic view of reaction profiles in laser directhyphen;write metallization in metallohyphen;organic films. Gold.

摘要

Laser directhyphen;write metallization in metallohyphen;organic films involves complex thermal profiles and changes in optical properties that affect the spatial resolution, chemical purity, and electrical properties of the resulting features. Compositional profiles of the metal features, determined by scanning Auger electron spectroscopy, are reported and correlated with the chemistry of the laserhyphen;initiated thermal reaction and the observed feature structure. Studies of the changes in optical properties of the films by conventional thermal decomposition offer important insights into the reaction mechanisms. We also report an optimized development procedure for the laserhyphen;exposed samples.