Analysis of the ion beam obtained from a small multicusp ion source

摘要

The small multicusp ion source developed at Lawrence Berkeley Laboratory (LBL) has been equipped with a low voltage ratio, single aperture extraction system. The influence of the potential of the plasma electrode and of a dipole filter field on the beam emittance are measured. A simple method to reduce hash is suggested. The aim of these investigations is to produce nitrogen ion beams with a high atomic ion fraction and a low emittance as required for a RFQhyphen;accelerator, which will be built for ion implantation.