Properties and photovoltaic applications of microcrystalline silicon films prepared by rf reactive sputtering

摘要

Undoped, phosphorushyphen;, and boronhyphen;doped microcrystalline silicon films were prepared by rf reactive sputtering, and their properties were investigated through structural, optical, and transport measurements. The merits of microcrystalline films for thepandncontacts in photovoltaic devices were demonstrated through the fabrication of single and tandemphyphen;ihyphen;nsolarhyphen;cell structures with best efficiencies between 5 and 6percnt;.