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Variable‐area resonant tunneling diodes using implanted in‐plane gates

机译:使用植入式平面栅极的可变连字符区域谐振隧穿二极管

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Variable‐area resonant tunneling diodes have been fabricated using a process in which the lateral confinement is produced by an in‐plane implanted gate. The basic operation of such devices is discussed, and the lateral confinement shown by both measurements and numerical modeling to be very nearly symmetrical about the resonant tunneling diode (RTD) barriers. Fine structure has been observed near threshold for relatively large area devices and this has been attributed to single‐electron or few‐electron tunneling through donor states in the quantum well. Additional fine structure seen in the valley current of small‐area devices has been shown to be consistent with the effects of lateral quantization in the system. Finally, results are presented for strip devices in which the resonant tunneling peak breaks up into numerous subpeaks on application of the gate voltage, and this is attributed to pinning of the confining potential by donors close to the RTD barriers.
机译:可变面积谐振谐振隧穿二极管是使用一种工艺制造的,其中横向约束由连字符平面植入栅极产生。讨论了此类器件的基本操作,并通过测量和数值模拟表明,谐振隧穿二极管 (RTD) 势垒的横向约束几乎是对称的。对于相对大面积的器件,已经观察到接近阈值的精细结构,这归因于通过量子阱中供体态的单连字符电子或少数连字符电子隧穿。在小面积器件的谷电流中观察到的其他精细结构已被证明与系统中横向量化的影响一致。最后,给出了条带器件的结果,其中谐振隧穿峰在施加栅极电压时分解成许多子峰,这归因于靠近RTD势垒的供体对限制电位的固定。

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