The incorporation of Si in ion‐implanted and thermally annealed GaAs has been studied by local vibrational mode spectroscopy. Raman scattering and Fourier transform IR absorption have been used to analyze the Si site distribution both in the near surface region and averaged over the whole implanted layer, respectively. The samples implanted with doses of 5×1014–1016cm−2were annealed with various techniques using different capping layers. The Si site distribution is found to depend strongly on the details of the annealing. In particular, capping with SiO2leads to the formation of the so‐called Si‐Xdefect complex in addition to the incorporation of Si on both lattice sites and the formation of nearest‐neighbor Si pairs.
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机译:通过局部振动模式谱研究了Si在离子&连字符和热退火砷化镓中的掺入.拉曼散射和傅里叶变换红外吸收分别用于分析近表面区域和整个注入层的平均Si位点分布。以5×1014–1016cm−2的剂量植入的样品使用不同的加盖层通过各种技术进行退火。发现 Si 位址分布在很大程度上取决于退火的细节。特别是,用SiO2加帽导致所谓Si&连字符X缺陷配合物的形成,此外还掺入了两个晶格位点上的Si&连字符;相邻的Si对的形成。
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