We report direct observation of thin-film interference effects in microcantilevers, an effect that can impact the optical monitoring of the microcantilever motion. When microcantilevers are illuminated with different wavelengths of light the amount of absorption and the wavelengths of maxima in the absorption depend upon the thickness of the layers, the materials used in the layers, and the direction of illumination. Wavelengths of maximum absorption are observed as microcantilever deflections due to heat-induced bending of the bimaterial structure of the microcantilever. Results are presented for different multilayer configurations and illumination directions. These results are then compared with theoretical calculations based on multilayer thin-film analysis.
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