Transport of argon ions in an inductively coupled high-density plasma reactor

摘要

The first direct observation of the velocity distribution of the metastable Ar↑(+*)↑(2)G↓(9/2) ions in the presheath of an inductively coupled plasma has been achieved by using the Doppler shifted laser induced fluorescence technique. Drift of the ions along the electric field in the presheath is observed and distribution functions of the velocity in both parallel and perpendicular directions, relative to the E field, are deduced at 5 and 40 mTorr. Present results show that in high density plasmas the velocity distribution of the metastable ions is directly related to that of the ground state argon ions. Neutral gas temperature of around 600 K is also measured from the absorption profile of a diode laser beam, set on one of the 772.4 nm argon lines. # 1997 American Institute of Physics. S0003-6951 (97)03707-8