This paper describes design and fabrication of active bead sliders using PZT thin films for in situ flying-height control. Silicon sliders with piezoelectric unimorph cantilevers were fabricated monolithically using micromachining process. The deflection of 70 nm was obtained at the tip of the 0.6-mm-long cantilever with a dnve voltage of 4 V. Furthermore, an air-bearing surface design that makes it possible to reduce the aerodynamic lift force under the head is discussed.
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