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A model for electrical conduction in metal‐ferroelectric‐metal thin‐film capacitors

机译:金属连字符;铁电连字符;金属薄连字符连字符薄膜电容器的导电模型

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Time‐zero current‐voltage characteristics and time‐dependent current behavior of metal‐ferroelectric‐metal (Pt‐PZT‐Pt) capacitor structures have been studied. Under constant‐voltage stressing, the current density through the 1500‐A˚‐thick lead‐zirconate‐titanate (PZT) film exhibits a power‐law dependence on time, with the exponent (∼0.33) independent of temperature and voltage. Electrode material dependence of current density indicates that the conventional model of trap‐limited single‐carrier injection over nonblocking contacts is inadequate to explain the time‐zero current. A change in top electrode material from Pt to In leads to the observation of work‐function‐driven Schottky contacts between the metal and ferroelectric. The current‐voltage characteristics fit a two‐carrier injection metal‐semiconductor‐metal model incorporating blocking contacts, with distinct low‐ and high‐current regimes (PZT is assumed to bep‐type and trap‐free in this model). Temperature‐dependentI‐Vmeasurements indicate a Pt‐PZT barrier height of 0.6 eV and an acceptor doping level of ∼1018cm−3in PZT. The implications of this model on the optimization of ferroelectric capacitors for dynamic random access memory applications are discussed.
机译:研究了金属电容器结构的时间&连字符;零电流&连字符;电压特性和时间&连字符-金属(Pt&连字符;PZT&连字符)电容器结构的电流行为。在恒定电压应力下,通过1500&连字符;A&环;&连字符;厚引线&连字符&锆酸盐&连字符钛酸盐(PZT)薄膜的电流密度表现出功率&连字符定律对时间的依赖性,指数(∼0.33)与温度和电压无关。电极材料对电流密度的依赖性表明,在非阻塞触点上诱捕&连字符限制单&连字符载流子注入的传统模型不足以解释时间&连字符;零电流。顶部电极材料从Pt到In的变化导致观察到金属和铁电体之间的功&连字符功能&连字符驱动肖特基接触。电流&连字符;电压特性符合包含阻断触点的双&连字符;载流子注入金属&连字符;半导体&连字符-金属模型,具有明显的低&连字符;和高&连字符电流状态(在此模型中假定PZT为&连字符类型和陷阱&连字符)。温度&连字符-取决于I&连字符;V测量表明,Pt&连字符;PZT势垒高度为0.6 eV,受体掺杂水平为∼1018cm−3in PZT。讨论了该模型对动态随机存取存储器应用中铁电电容器优化的影响。

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